| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus in which a catalyst in a decomposition tube is heated sufficiently to exert enough the capability of decomposing ammonia even in the case of treating an exhaust gas containing a high level of ammonia such as one discharged from a GaN-based compound semiconductor manufacturing process, or even in the case of using an ammonia decomposition tube having a large inner diameter. <P>SOLUTION: In the ammonia decomposition tube, besides a heater on the outer wall of the decomposition tube, further inside the decomposition tube, a container housing a heater in a cylindrical form such that the central axis is the same as that of the decomposition tube is installed. <P>COPYRIGHT: (C)2011,JPO&INPIT |
