发明名称 METHOD FOR FORMING CONDUCTIVE PATTERN, CONDUCTIVE PATTERN SUBSTRATE, AND TOUCH PANEL SENSOR
摘要 A conductive pattern formation method of the present invention includes a first exposure step of radiating active light in a patterned manner to a photosensitive layer including a photosensitive resin layer provided on a substrate and a conductive film provided on a surface of the photosensitive resin layer on a side opposite to the substrate; a second exposure step of radiating active light, in the presence of oxygen, to some or all of the portions of the photosensitive layer not exposed at least in the first exposure step; and a development step of developing the photosensitive layer to form a conductive pattern following the second exposure step.
申请公布号 EP2620814(A4) 申请公布日期 2014.01.15
申请号 EP20120838597 申请日期 2012.10.01
申请人 HITACHI CHEMICAL COMPANY, LTD. 发明人 YAMAZAKI HIROSHI;IGARASHI YOSHIMI
分类号 G03F7/38;G02F1/1343;G03F7/004;G03F7/027;G03F7/028;G03F7/09;G03F7/095;G03F7/11;G03F7/20 主分类号 G03F7/38
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