| 摘要 |
A capacitive transducer includes a device which includes a plurality of cells. Each cell includes: a first electrode; a diaphragm which includes a second electrode facing the first electrode; and a diaphragm support unit which supports the diaphragm to form a gap. The device includes a first cell which includes the diaphragm with a first spring constant and a second cell which includes the diaphragm with a second spring constant which is lower than the first spring constant. A voltage applied between the first electrode and the second electrode of the first cell is higher than a voltage applied between the first electrode and the second electrode of the second cell. |
