ANALYTICAL METHOD

摘要

The object of the present invention is to analyze a functional organic compound with high accuracy. In the present invention, cluster ions are accelerated so that the kinetic energy of cluster ions is less than 3.1 eV per one atom that makes up the cluster ion and the cluster ions enter a sample 18. Since the functional organic compound in the sample 18 is etched without the breakdown of the chemical structure, the functional organic compound, which has not been chemically denatured, is exposed on the surface of the sample 18. By alternately performing the etching and the surface analysis of the sample 18, or performing the surface analysis of the sample 18 while performing the etching, the sample 18 can be accurately analyzed in the depth direction.