发明名称 TRAY FOR MEASURING, DRIVING METHOD OF THE TRAY FOR MEASURING, DEPOSITION APPRATUS HAVING A TRAY FOR MEASURING AND MEASURING METHOD OF THE SAME
摘要 Provided in an embodiment according to the present invention is a measurement tray comprising: a support frame; a base plate installed at the support frame and having a plurality of slits; a shutter plate positioned on one surface of the base plate and having an exposure part and a blocking part; a motor for moving the shutter plate to move the exposure part of the shutter plate; and a driver for controlling the motor.
申请公布号 KR20140004916(A) 申请公布日期 2014.01.14
申请号 KR20120072276 申请日期 2012.07.03
申请人 LG DISPLAY CO., LTD. 发明人 YI, KYUNG SOO
分类号 H01L21/673;G02F1/13;H01L21/205;H01L51/56 主分类号 H01L21/673
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