发明名称 |
TRAY FOR MEASURING, DRIVING METHOD OF THE TRAY FOR MEASURING, DEPOSITION APPRATUS HAVING A TRAY FOR MEASURING AND MEASURING METHOD OF THE SAME |
摘要 |
Provided in an embodiment according to the present invention is a measurement tray comprising: a support frame; a base plate installed at the support frame and having a plurality of slits; a shutter plate positioned on one surface of the base plate and having an exposure part and a blocking part; a motor for moving the shutter plate to move the exposure part of the shutter plate; and a driver for controlling the motor. |
申请公布号 |
KR20140004916(A) |
申请公布日期 |
2014.01.14 |
申请号 |
KR20120072276 |
申请日期 |
2012.07.03 |
申请人 |
LG DISPLAY CO., LTD. |
发明人 |
YI, KYUNG SOO |
分类号 |
H01L21/673;G02F1/13;H01L21/205;H01L51/56 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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