发明名称 |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
摘要 |
An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials. |
申请公布号 |
US8629393(B1) |
申请公布日期 |
2014.01.14 |
申请号 |
US201313834484 |
申请日期 |
2013.03.15 |
申请人 |
KIRKPATRICK SEAN R;KIRKPATRICK ALLEN R;EXOGENESIS CORPORATION |
发明人 |
KIRKPATRICK SEAN R;KIRKPATRICK ALLEN R |
分类号 |
H05H3/02 |
主分类号 |
H05H3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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