| 发明名称 |
Acceleration sensor |
| 摘要 |
A semiconductor device includes a semiconductor substrate and a semiconductor mass element configured to move in response to an applied acceleration. The mass element is defined by trenches etched into the semiconductor substrate and a cavity below the mass element. The semiconductor device includes a sensing element configured to sense movement of the mass element. |
| 申请公布号 |
US8627720(B2) |
申请公布日期 |
2014.01.14 |
| 申请号 |
US201213612042 |
申请日期 |
2012.09.12 |
| 申请人 |
KAUTZSCH THORALF;WINKLER BERNHARD;MEINHOLD DIRK;ROSAM BEN;FOESTE BERND;THAMM ANDREAS;BINDER BORIS;INFINEON TECHNOLOGIES AG |
发明人 |
KAUTZSCH THORALF;WINKLER BERNHARD;MEINHOLD DIRK;ROSAM BEN;FOESTE BERND;THAMM ANDREAS;BINDER BORIS |
| 分类号 |
G01P15/125;H01L21/02;H01L29/84 |
主分类号 |
G01P15/125 |
| 代理机构 |
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代理人 |
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| 地址 |
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