发明名称 Pinnoitus- ja materiaalinvalmistusmenetelmä
摘要 The innovation is targeted at the coating and material production method, which is based on the application of picosecond, femtosecond and attosecond pulses a) in a vacuum, b) in a gas-pressurised mode, c) in liquid state or d) in the clean room standard; the repetition frequency of the pulses is between the span of 100 kHz and 10 Ghz, with fibre reinforcement or semiconductor laser, which operate on the wavelength of the UV-visible-IR light. The laser beams are directed to a separate space a-d) with optic fibres or as a collimated beam and only inside this space is focused to the volatizing / processing material by self-cleansing optics.
申请公布号 FI20120169(A) 申请公布日期 2014.01.14
申请号 FI20120000169 申请日期 2012.05.22
申请人 ARCTIC IP INVESTMENT AB 发明人 KINNUNEN, PETTERI;RUUTTU, JARI
分类号 H01L21/02;B23K26/12;G02B27/00 主分类号 H01L21/02
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