| 摘要 |
The present invention relates to a method for manufacturing a solar cell. The method for manufacturing a solar cell includes a substrate preparation step for preparing a first conductivity type substrate, an emitter formation step for forming a second conductivity type emitter layer on the front surface of the substrate, a plasma processing step for forming hydrophobic regions by performing a plasma process on the back surface of the substrate, a passivation layer formation step for forming a passivation layer having a via hole in a position corresponding to the hydrophobic region and formed on the back surface of the substrate, and a backside electrode formation step for forming a backside electrode electrically connected to the lower surface of the substrate though the via hole and formed on the lower surface of the passivation layer. [Reference numerals] (AA) Start; (BB) End; (S10) Substrate preparation step; (S20) Emitter layer formation step; (S30) Anti-reflection coating step; (S40) Plasma processing step; (S50) Passivation layer formation step; (S60) Front electrode formation step; (S70) Backside electrode formation step |
