发明名称 |
Out-of plane MEMS resonator with static out-of-plane deflection |
摘要 |
A method of forming a microelectromechanical systems (MEMS) device includes forming an electrode on a substrate. The method includes forming a structural layer on the substrate. The structural layer is disposed about a perimeter of the electrode and has a residual film stress gradient. The method includes releasing the structural layer to form a resonator coupled to the substrate. The residual film stress gradient deflects a first portion of the resonator out of a plane defined by a surface of the electrode. |
申请公布号 |
US8629739(B2) |
申请公布日期 |
2014.01.14 |
申请号 |
US201213599240 |
申请日期 |
2012.08.30 |
申请人 |
QUEVY EMMANUEL P.;BERNSTEIN DAVID H.;MOTIEE MEHRNAZ;SILICON LABORATORIES INC. |
发明人 |
QUEVY EMMANUEL P.;BERNSTEIN DAVID H.;MOTIEE MEHRNAZ |
分类号 |
H03H9/24;H01L21/00;H03H3/007 |
主分类号 |
H03H9/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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