A MEMS circuit comprises a MEMS device arrangement with temperature dependent output; a resistive heating circuit; and a feedback control system for controlling the resistive heating circuit to provide heating in order to maintain a MEMS device at a constant temperature. The heating is controlled in dependence on the ambient temperature, such that a MEMS device temperature is maintained at one of a plurality of temperatures in dependence on the ambient temperature. This provides power savings because the temperature to which the MEMS device is heated can be kept within a smaller margin of the ambient temperature.
申请公布号
US8629731(B2)
申请公布日期
2014.01.14
申请号
US200913128059
申请日期
2009.11.10
申请人
KONING JAN JACOB;VAN BEEK JOZEF THOMAS MARTINUS;NXP, B.V.