BUFFER CHAMBER, IN-LINE CHAMBER SYSTEM COMPRISING THE SAME, AND CONTROLLING METHOD OF THE SAME

摘要

The present invention relates to a buffer chamber, an in-line chamber system including the same, and a controlling method for a buffer chamber which comprises: a chamber body where an inlet is formed at one side and an outlet is formed at the other side thereof; a first transfer unit which can transfer a transfer body inputted through the inlet toward the outlet; and an idle transfer unit which is placed between the first transfer unit and the outlet in order to allow the transfer body to pass therethrough.