| 摘要 |
A testing method of a semiconductor device and a test handler for performing the same are provided to improve the management efficiency of whole facility by preventing that some of sorter units is maintained in the standby state. A chamber unit(100) is connected to a tester(20). A test tray(30) in which semiconductor devices are accepted is carried in and out from the tray buffer space. The test process of the semiconductor devices accepted in the test trays is performed in the test site. A loading action for loading semiconductor devices to the test trays from the customer trays and an unloading action for unloading the semiconductor devices from the test trays to the customer trays are selectively performed by a sorter unit(200) according to the load amount. |
