发明名称 |
Piezoelectric element, method of manufacturing the same, and ink jet head |
摘要 |
A piezoelectric element 10 includes a supporting body 12, a lower electrode 16 that is formed over the supporting body, a piezoelectric layer 20 that is formed over the lower electrode, and an upper electrode 24 that is formed over the piezoelectric layer so as to oppose the lower electrode via the piezoelectric layer. A step portion 20A is formed at a peripheral portion of the piezoelectric layer at a side of the lower electrode such that a surface of the piezoelectric layer at the side of the lower electrode is larger than a surface of the piezoelectric layer at a side of the upper electrode. |
申请公布号 |
US8628174(B2) |
申请公布日期 |
2014.01.14 |
申请号 |
US20100717816 |
申请日期 |
2010.03.04 |
申请人 |
TAKAHASHI SHUJI;FUJIFILM CORPORATION |
发明人 |
TAKAHASHI SHUJI |
分类号 |
B41J2/045;H01L41/00;H02N2/00 |
主分类号 |
B41J2/045 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|