| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate processing method for forming a line on the substrate and solidifying the same. SOLUTION: The substrate processing apparatus 100 includes: a stage 1100 for placing the substrate S; a discharge unit 1200 discharging ink I and forming a plurality of lines on the substrate S placed on the stage 1100; a solidifying unit 1400 for solidifying the discharged ink I; and a transferring unit 1500 moving the stage 1100 or moving the discharge unit 1200 and solidifying unit 1400. COPYRIGHT: (C)2013,JPO&INPIT |
