| 摘要 |
The invention provides a substrate conveying device which can accurately perform the transferring of substrates by a substrate transferring device; the substrate conveying device comprises a container, a container conveying device and a position adjusting mechanism; the container comprises a container body and a carrying support component, wherein the container body comprises an entrance for the substrate and a substrate containing space which can contain a plurality of substrates at intervals in vertical direction; the carrying support component can support the container body and comprises a fan filter unit supplying clean air to the substrate containing space while carrying and supporting the container body; the container conveying device conveys the container to a support platform in a manner that the carrying support component carrying and supporting the container body is carried and supported over the support platform; the position adjusting mechanism is directly abutted against the container body in the state that the container is carried and supported by the support platform, and the position adjusting mechanism adjusts the position of the container body in horizontal direction to the position for transferring the substrates where the substrate transferring device transfers the substrates via the entrance. |
