Junction leakage reduction through implantation

摘要

Provided is a method of fabricating a semiconductor device. The method includes forming a first III-V family layer over a substrate. The first III-V family layer includes a surface having a first surface morphology. The method includes performing an ion implantation process to the first III-V family layer through the surface. The ion implantation process changes the first surface morphology into a second surface morphology. After the ion implantation process is performed, the method includes forming a second III-V family layer over the first III-V family layer. The second III-V family layer has a material composition different from that of the first III-V family layer.