发明名称 Methods and structures for customized STI structures in semiconductor devices
摘要 A method and structure provide for customizing STI, shallow trench isolation, structures in various parts of a system-on-chip, SOC, or other semiconductor integrated circuit device. Within an individual chip, STI structures are formed to include different dielectric thicknesses that are particularly advantageous for the particular device portion of the SOC chip in which the STI structure is formed.
申请公布号 US8629514(B2) 申请公布日期 2014.01.14
申请号 US201113008252 申请日期 2011.01.18
申请人 WANG YIMIN;WAFERTECH, LLC 发明人 WANG YIMIN
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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