| 摘要 |
The present invention relates to a gas supplying unit. According to one embodiment of the present invention, the a gas supplying unit including a reactor for generating a metal halogen gas and providing a space for the reaction between a metal source and a halogen-containing gas; and a flow change part for changing the flow of the halogen-containing gas supplied from one of the halogen-containing gas end towards the position of the metal source. The end of the halogen-containing gas is located in the outside of the metal source in the reactor. |
