SUBSTRATE PROCESSING APPARATUS AND THE METHOD FOR LOADING AND UNLOADING A SUBSTRATE USING THE SAME

摘要

An aspect of the present invention provides a substrate processing apparatus and a method for loading and unloading the substrate using the same capable of reducing work time for loading and unloading a large quantity of substrates by collectively transferring a main disk, thereby enhancing productivity. The substrate processing apparatus according to an embodiment of the present invention comprises: a chamber; the main disk installed within the chamber and having a plurality of the substrates; a main disk support for supporting the main disk; a lift driver installed at the lower part of the main disk for lifting the main disk; and a clamp installed at the upper part of the main disk for collectively transferring the main disk into or out of the chamber when a clamping operation is released by being provided with a lift body for clamping or releasing the main disk. [Reference numerals] (400) Lift driver; (500) Rotation driver; (630) Clamp lift driver