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发明名称
BEAM DELIVERY APPARATUS, EUV RADIATION APPARATUS, EUV OPTICAL APPARATUS, LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS.
摘要
申请公布号
NL2011772(A)
申请公布日期
2014.01.13
申请号
NL20132011772
申请日期
2013.11.08
申请人
ASML NETHERLANDS B.V.
发明人
BANINE VADIM;BENSCHOP JOZEF;MOORS JOHANNES
分类号
G03F7/20;H05G2/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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