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发明名称
曝光方法及曝光装置、以及元件制造方法
摘要
在一边使标线片及晶圆在既定曝光条件下相对照明光所照射之照明区域(IAR)及曝光区域进行同步扫描、一边将标线片上之图案区域(PA)之图案透过投影光学系统转印至晶圆W上的扫描曝光当中,修正标线片与晶圆的相对位置时,系使用修正图,该修正图包含同步扫描中之标线片与晶圆在XY面内之相对位置偏离量相关的非参数化资讯,亦即在同步扫描之扫描方向之各取样位置的相对位置偏离修正量。
申请公布号
TWI422980
申请公布日期
2014.01.11
申请号
TW095124741
申请日期
2006.07.07
申请人
尼康股份有限公司 日本
发明人
佑川彩子;中岛伸一
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
桂齐恒 台北市中山区长安东路2段112号9楼;阎启泰 台北市中山区长安东路2段112号9楼
主权项
地址
日本
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