| 摘要 |
According to the present invention, an apparatus for processing a substrate includes a substrate support member; and a movable injection member supplying a fluid onto a substrate placed on the substrate support member. The movable injection member includes a first nozzle arm rotating to inject at least one fluid; and a second nozzle arm rotating with a driving source and a separate rotation shaft on the first nozzle arm to inject at least one fluid. |
