| 摘要 |
The invention relates to a method for manufacturing a multilayer structure on a first substrate made of a first material having a Young's modulus Ev, the method including: using a second substrate having a planar surface covered by the multilayer structure, the second substrate being made of a second material having a Young's modulus Es that is different from the Young's modulus Ev, and a thickness es, the mean Young's modulus Es over thickness es, measured in any direction in a plane parallel to said surface, being constant, plus or minus 10%; bonding the first substrate to the multilayer structure; and removing the second substrate. |
