发明名称 APPLICATION FOR SOLAR CELL AND METHOD OF FABRICATING THE SOLAR CELL
摘要 According to an embodiment of the present invention, an apparatus for fabricating a solar cell includes a chamber including a source injection part; a filter part located in the chamber; a substrate support part located in the chamber; a first heating member heating the substrate support part; and a second heating member heating the filter part. According to the embodiment of the present invention, a method for fabricating a solar cell includes a step of forming a Cu-In-Ga thin film layer on a substrate; and a step of forming a Se thin film layer on the substrate. A step for depositing the Se includes a step of inputting a Se source to the chamber; a step of allowing the Se source to flow though the filter part; and a step of depositing the Se source on the substrate. [Reference numerals] (AA) Substrate
申请公布号 KR101349475(B1) 申请公布日期 2014.01.10
申请号 KR20120082273 申请日期 2012.07.27
申请人 LG INNOTEK CO., LTD. 发明人 LEE, JIN WOO;KWON, SE HAN
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
代理机构 代理人
主权项
地址