| 摘要 |
PURPOSE: To improve the wear resistance and corrosion resistance of a member without deteriorating the shape of the tip even if it is the one having a small tip curvature radius by executing ion irradiation in such a manner that the density of implantating energy is regulated to specified one. CONSTITUTION: A member having <=1μm tip curvature is applied with ions at implantating energy density satisfying the formulae or below;Δr/r=(a1-a2×r)+(b1-b2×r) logw, a1=(0.6±0.12)-(0.0067±0.0013)x, a2=(0.60±0.12)-(0.0069±0.0014)x, b1=(0.50±0.10)-(0.0058±0.0012)x, b2=(0.40±0.08)-(0.0048±0.0010)x, r; tip curvature (μm),Δr; the variation (μm) of the tip curvature, w;implantating energy density (W/cm<2> ) and x; incident angle (deg). In the case the incident angle x to the center line of the tip part of the member reduces, the number of the ions bombarded to the tip part is extremely made large, and size of the tip part is made high of r+Δr. As forΔr/r, the allowable value is decided by the product, and the angle x and density w can be found.
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