发明名称 UPWARD FLOW FORMING ELEMENT AND NONCONTACT TRANSFER DEVICE USING THE UPWARD FLOW FORMING ELEMENT
摘要 <p>[Problem] To provide an upward flow forming element capable of reducing the amplitude of an end part of a transferred object to be transferred and increasing the levitation amount by preventing negative pressure from being generated, and the like. [Solution] An upward flow forming element (6) provided with: a bottomed cylindrical base part (6c) having a cylinder inner wall surface (6b) at the inner surface thereof; an annular flange part (6d) stretching radially outward at the peripheral edge of an opening of the cylindrical base part; a plurality of engagement hanging parts (6f) disposed along the circumferential direction of the outer peripheral edge of the annular flange part, radially facing each other, and extending downward; engagement projection parts (6g) projecting outward at the lower ends of the engagement hanging parts; and at least one fluid jet hole (6j) bored from the outer peripheral surface to the cylinder inner wall surface of the cylindrical base part, and having a front end facing the center of the cylindrical base part, and the like. When the number of the fluid jet holes is one, a fluid jetted from the fluid jet hole collides against the cylinder inner wall surface of the cylindrical base part, scatters upward in a spray form, and forms an upward flow. When the number of the fluid jet holes is two, fluids jetted from the fluid jet holes collide with each other, scatter upward in a spray form, and form an upward flow.</p>
申请公布号 KR20140004113(A) 申请公布日期 2014.01.10
申请号 KR20137016902 申请日期 2011.09.22
申请人 OILES CORPORATION 发明人 OZAWA HIDEO;TSUNODA KOUICHI;YASUDA TAKAHIRO
分类号 H01L21/677;B65G49/06;B65G51/03 主分类号 H01L21/677
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