发明名称 METHOD AND DEVICE FOR DEPOSITION REACTORS (VERSIONS)
摘要 FIELD: metallurgy.SUBSTANCE: feed line serves to feed initial product steam from initial product source into reaction chamber. Device to withdraw heat from reaction chamber heater serves to prevent initial product steam condensation in liquid or solid phase between initial product source and reaction chamber.EFFECT: possibility to precipitate material onto heated substrate in sequential surface reactions.16 cl, 22 dwg, 3 ex
申请公布号 RU2503744(C2) 申请公布日期 2014.01.10
申请号 RU20100146303 申请日期 2009.04.15
申请人 PIKOSUN OJ 发明人 LINDFORS SVEN;SOININEN PEKKA J.
分类号 C23C16/455 主分类号 C23C16/455
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