| 摘要 |
PURPOSE: To improve the measuring accuracy of a probe inspecting device. CONSTITUTION: A prober device mounted with a test head is provided with a probe card 8, which is fixed to the test head 3, and an aligning mechanism 5 which alignes a measuring subject placed on a placing table 4 with the probe card. At the time of aligning the measuring subject with the probe card in the angle direction (θdirection), while performing image pick-up by a TV camera, the deviation (θ) of the placing table whereupon the measuring subject is placed is adjusted, and after aligning the arrangement of the measuring subjects with the probe card by adjusting the deviation (θ) of the placing table, the deviation (θ) of the placing table from the X and Y axes is calculated by the software in the CPU integrated with a prober part 2, and the X and Y drive of the placing table is controlled. The high-frequency characteristics are improved by shortening the measuring cable and inspection speed is improved by directly mounting the test head, and aligning and measuring accuracies are improved by theθ-adjustment of the placing table and the CPU control.
|
