| 摘要 |
PROBLEM TO BE SOLVED: To suppress reduction in reliability of a liquid discharge head due to the dissolution of a protective layer.SOLUTION: A substrate 5 for a liquid discharge head includes a base substrate 1, a heat-generating resistive layer 10 placed on the base substrate 1, a pair of lines 9 placed on the base substrate 1, and a protective layer 14 covering the heat-generating resistive layer 10 and the pair of lines 9. The protective layer 14 contains a material represented by the formula: SiCN(x+y+z=100(at.%),30≤x≤59(at.%),y≥5(at.%),z≥15(at.%)). |
