发明名称 METHOD FOR MANUFACTURING ELECTRO-OPTIC DEVICE, AND ELECTRO-OPTIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optic device capable of improving electric reliability, and an electro-optic device.SOLUTION: The method for manufacturing an electro-optic device includes the steps of: forming a color filter groove in a region adjoining to a relay layer 55 in an insulating layer including a fourth interlayer insulating layer 11e; forming a color filter layer 80 by filling the color filter groove with a color filter material; forming a first contact hole that reaches to the relay layer 55; forming a fifth interlayer insulating layer 11f having a flattened upper surface on the fourth interlayer insulating layer 11e; forming a second contact hole 53b that reaches to the relay layer 55 and is thinner than the first contact hole; subjecting the inside of the second contact hole 53 to a fluoric acid treatment; forming a transparent electrode in the second contact hole 53b and on the fifth interlayer insulating layer 11f; and patterning the transparent electrode to form a pixel electrode.
申请公布号 JP2014002341(A) 申请公布日期 2014.01.09
申请号 JP20120139477 申请日期 2012.06.21
申请人 SEIKO EPSON CORP 发明人
分类号 G02F1/1343 主分类号 G02F1/1343
代理机构 代理人
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