METHOD OF FABRICATING VERTICAL STRUCTURE USING WET ETCHING
摘要
<p>A method for fabricating vertical structures using a wet etching method is provided. The method comprises a step of forming identical patterns corresponding to the vertical through type structures on both sides of a base plate using a first mask; a step of etching the base plate after the patterning step using a first solution; and a step of stopping the etching of the base plate on the vertical through type structure. [Reference numerals] (AA) Vertical</p>
申请公布号
KR20140002973(A)
申请公布日期
2014.01.09
申请号
KR20120070054
申请日期
2012.06.28
申请人
SNU R&DB FOUNDATION;INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY;EWHA UNIVERSITY - INDUSTRY COLLABORATION FOUNDATION