| 摘要 |
The present invention is a laser irradiation apparatus which is capable of selecting among a plurality of laser lights L having different wavelengths a laser light of a wavelength according to a purpose of irradiation and irradiating an object Ob to be irradiated with the laser light having the wavelength. The laser irradiation apparatus includes: on an optical path of a mixed light beam of the plurality of laser lights L having different wavelengths, a slit having a width corresponding to a diffraction limit of the laser light having the shortest wavelength among the plurality of laser lights L having different wavelengths; and an objective lens for focusing a laser light that has passed through the slit, on the object Ob to be irradiated. |
