发明名称 |
CAPACITIVE HUMIDITY SENSOR AND METHODS OF MANUFACTURING THE SAME |
摘要 |
The capacitive humidity sensor of the present invention comprises an insulation substrate, a lower electrode positioned on the insulation substrate and having electric conductivity, a humidity sensitive membrane pattern positioned on the lower electrode and enabling outer moisture to permeate, and an upper electrode positioned on the humidity sensitive membrane pattern and made of a porous carbon nanotube. |
申请公布号 |
KR20140003085(A) |
申请公布日期 |
2014.01.09 |
申请号 |
KR20120070643 |
申请日期 |
2012.06.29 |
申请人 |
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION |
发明人 |
MIN, NAM KI;HONG, HYUN PYO;JUNG, KYUNG HOON |
分类号 |
G01N27/22 |
主分类号 |
G01N27/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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