发明名称 METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD
摘要 PROBLEM TO BE SOLVED: To provide a method for more easily manufacturing a liquid discharge head having an orifice plate formed of silicon.SOLUTION: The method for manufacturing a liquid discharge head comprises the steps of: preparing a first substrate having an energy generating element at a front surface side thereof; forming a wall member, which is to be a wall for a liquid flow passage, at the front surface side of the first substrate; forming a mask having an opening on the wall member and forming a second substrate, which is composed of silicon and is to be an orifice plate, on the mask; and forming a liquid supply port in the first substrate and a liquid discharge port in the second substrate by supplying an etchant from a back surface of the first substrate, the back surface being a surface opposite the front surface.
申请公布号 JP2014000754(A) 申请公布日期 2014.01.09
申请号 JP20120138388 申请日期 2012.06.20
申请人 CANON INC 发明人 ABO HIROYUKI;MATSUMOTO KEIJI
分类号 B41J2/16 主分类号 B41J2/16
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