INSPECTION DEVICE, AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection device capable of accurate inspection, an inspection method, and a chuck stage.SOLUTION: A defect inspection device according to an embodiment of the present invention includes: a light source 10 that emits irradiation light including light transmitting a sample 20; a detector 11 that detects light reflected on the sample 20; a chuck stage 31 that has support pins 32 for supporting the sample 20 arranged thereon, and adsorbs the sample 20 from gaps between the support pins 32 while having gaps between an end part of the sample 20 and the chuck stage 31; and a processing device 50 that combines two images of the sample 20 photographed by changing a position of the sample 20 with respect to the shuck stage 31 so as to create an inspection image.