| 摘要 |
PROBLEM TO BE SOLVED: To provide a UV sensor element capable of preventing reduction in a UV absorptive sensitive layer caused by oxidation of a detection electrode.SOLUTION: A UV sensor element 1 roughly comprises a substrate 2, a UV absorptive sensitive layer 4, a buffer layer 6, detection electrodes 8a, 8b, a protective layer 10, a first solder resist layer 12, columnar extraction electrodes 14a, 14b, and external electrodes 20a, 20b. For the material of the UV absorptive sensitive layer 4, such a material is used that selectively absorbs only UV rays and can generate a current by the UV rays, and for example, a ZnO layer is used. For the material of the buffer layer 6, such a material is used that comprises similar structural elements to those of the UV absorptive sensitive layer 4 and has a higher oxygen concentration compared to the UV absorptive sensitive layer 4, for example, a ZnO layer having a high oxygen concentration is used. The protective layer 10 is formed on the buffer layer 6 to approximately cover the detection electrodes 8a, 8b. For the material of the protective layer 10, such a material is used that is excellent in waterproofing property and moisture proofing property, for example, a SiOlayer is used. |
