发明名称 FORCE PROBE MICROSCOPE AND HEIGHT DISTRIBUTION MEASUREMENT METHOD
摘要 <p>Provided is a force probe microscope with which high-resolution measurement is possible without lowering a Q value of a force probe even in a liquid. A height distribution of a surface of a sample (1) is measured using a force probe microscope in which a probe (12) is disposed upon a leading end of an oscillator (9), wherein the length of the probe is longer than the thickness of means (5, 6) which retain a liquid upon a sample platform (2).</p>
申请公布号 WO2014006734(A1) 申请公布日期 2014.01.09
申请号 WO2012JP67268 申请日期 2012.07.06
申请人 HITACHI, LTD.;HEIKE SEIJI 发明人 HEIKE SEIJI
分类号 G01Q30/14;G01Q60/38 主分类号 G01Q30/14
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