| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing apparatus capable of easily adjusting intervals among a plurality of focus spots of laser beam split into plural ones.SOLUTION: A laser beam split mechanism 8 is provided with a split unit equipped with: a 1/2 wavelength plate 81; a first beam splitter 82; a first mirror 83; a second mirror 84; a second beam splitter 85 for guiding P polarized light and S polarized light reflected by the first mirror and the second mirror to an optical path in the same direction; and angle adjustment means 840 for adjusting an angle at which at least either the P polarized light or the S polarized light reflected by the first mirror and the second mirror enters the second beam splitter. Thus, intervals among a plurality of focus spots of laser beam comprising the P polarized light and the S polarized light collected by a light collector 7 are adjusted. |
