| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy in inspecting components by correcting deviation of a focal position between a vertical edge and a horizontal edge.SOLUTION: A component inspection device comprises: a coaxial lighting system for irradiating an object with light by using a light permeable mirror plate; and an image formation lens for imaging light exposed form the coaxial lighting system and reflected by the object on an image pickup device. An optical plate for correcting deviation of a focal position is disposed between the object and the image pickup device. The light permeable mirror plate is inclined against a plane orthogonal to an optical axis of the image formation lens. The optical plate is inclined at the same angle with the light permeable mirror plate against a plane orthogonal to the optical axis of the image formation lens, at a position rotated 90 degrees from the inclined position of the light permeable mirror plate with the optical axis as the center, so that a distance for passing through the optical plate on an optical path of the light reflected by the object and a distance for passing through the light permeable mirror plate on the optical path are equal. |
