| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for detecting foreign matter in powder by a terahertz pulse wave, which are capable of precise detection of foreign matter in powder included in a container whose rapping surface is a resin sheet and whose rapping rear surface is an aluminum sheet.SOLUTION: The device comprises: an oscillation part 11 which generates terahertz pulse wave and irradiates the terahertz pulse wave as irradiation light; an optical system 12 which conducts the irradiation light to a first part of the container and focuses reflected light from the container; a receiving part 13 which outputs a signal corresponding to the reflected light focused and measures an echo; a scanner 14 which two-dimensionally scans the position of the irradiation light on the first part where the irradiation light is conducted; and an operation part 15 which detects foreign matter 21 in the powder in the container 20 on the basis of at least one of a time waveform signal output from the receiving part in time sequence, a reflected image, a power spectrum, a tomographic image, and a frequency image. |
