发明名称 Transfer apparatus of susceptor
摘要 Provided are a wafer carrier transferring apparatus and a semiconductor conductor fabricating system having the wafer carrier transferring apparatus. The wafer carrier transferring apparatus comprises an arm pocket portion supporting a wafer carrier and a pocket end portion detachably coupled to opposite ends of the arm pocket portion.
申请公布号 KR101349460(B1) 申请公布日期 2014.01.09
申请号 KR20070061428 申请日期 2007.06.22
申请人 发明人
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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