| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface plate and a laminar surface plate, capable of suppressing thermal expansion and thermal contraction generated in the process of a long-term experiment.SOLUTION: In a surface plate 10, a flow channel 30 is formed by: a frame 12 constituting the side wall part of the surface plate 10; an upper surface plate 14 having a flat plate shape covering the upper surface of the frame 12; a lower surface plate 16 having a flat plate shape covering the lower surface of the frame 12; and a plurality of columns 32 arranged between the upper surface plate 14 and the lower surface plate 16. A fluid whose temperature is adjusted is flowed in the flow channel 30 with a refrigerant circulation device 18 connected to the flow channel 30. Consequently, by controlling the temperature and flow rate of the fluid with the refrigerant circulation device 18, thermal expansion and thermal contraction of the surface plate 10 can be suppressed. |
