发明名称 Clean room
摘要 The clean room has a number of regions, each with a cover chamber (4) to which is fed the air produced in a fresh air air conditioning device at a predefined temp. and humidity and a defined level of freedom from dust by regulating the fresh air. A high efficiency filter is mounted in a cover filter region (10). A working zone (5) feeds the air from the cover chamber through the cover filter region after cleaning. A supply zone (9) beneath the grid base of the working zone contains a drive supply device and an environment maintenance device. A circulation channel (13 circulates the air from the working zone to the cover chamber for each region via the supply zone. Each region is conditioned or air conditioned.
申请公布号 DE19723954(A1) 申请公布日期 1998.03.26
申请号 DE19971023954 申请日期 1997.06.06
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP 发明人 NAGAFUNE, HITOSHI, TOKIO/TOKYO, JP;FUKUMOTO, TAKAAKI, TOKIO/TOKYO, JP;SHIBUYA, HAKUSHI, TOKIO/TOKYO, JP;EZAKI, KOJI, TOKIO/TOKYO, JP
分类号 E04H5/02;F24F3/16;F24F7/06;H01L21/02;(IPC1-7):F24F7/00 主分类号 E04H5/02
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