SUPERLATTICE STRUCTURE, SEMICONDUCTOR ELEMENT INCLUDING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a superlattice structure, a semiconductor element including the same, and a method of manufacturing the semiconductor element.SOLUTION: Provided are a superlattice structure, and a semiconductor element including the same. The superlattice structure includes a plurality of pairs of layers consisting of repeatedly stacked two or more pairs, where each pair consists of an upper and a lower layer made of materials different from each other, the two layers in each pair have the same thickness, and each of the plurality of pairs has a different total thickness than the other pairs.