| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electrostatic capacitance type acceleration sensor which can reduce the influence of a parastic capacity of the wiring, and can detect the acceleration accurately. SOLUTION: In an in-plate displacement type of electrostatic capacitance type acceleration sensor, a sensor 2 having a movable electrode and a fixed electrode formed of a silicon substrate; a pair of protective substrates 3 and 4 jointed to the sensor 2 to hold the sensor; and an IC 6 to detect the acceleration from the static capacitance of the sensor 2; are provided. While electrodes for connection formed in order to be connected with the IC 6 are provided to one side protective substrate 3 side in the sensor 2, through holes are provided on the electrode for connection to form electrode holes 8 respectively, to one side protective substrate 3. While the IC 6 is fixed on the protective substrate 3 forming the electrode holes 8, it is connected electrically with the electrodes for connection respectively, by inserting to the electric holes 8. |
