发明名称 LIGHT IRRADIATION DEVICE AND EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an optical system capable of uniformizing illumination distribution of light emitted from an emission surface of light of a lens array integrator, when light emitted from a light source including a plurality of LEDs is taken in the lens array integrator, and to realize a highly-efficient light irradiation device.SOLUTION: A light irradiation device 1 includes: a light source section 11 including a plurality of LEDs 21; a lens array integrator 15; and an optical system 13 which projects light emitted from the light source section 11 onto an incident surface 15S of light of the lens array integrator 15. The optical system 13 has a rod integrator 17.
申请公布号 JP2014002212(A) 申请公布日期 2014.01.09
申请号 JP20120136095 申请日期 2012.06.15
申请人 USHIO INC 发明人 MATSUSHIMA TAKEO
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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