| 摘要 |
PROBLEM TO BE SOLVED: To restrain the occurrence of particles for preventing the pollution of a treating substrate, and also to simplify the cleaning treatment before maintenance. SOLUTION: A sheet member of 1mm thick of fluororesin, for instance, PTFE(polytetrafluoroethylene) is worked in a prescribed size and abuttedly fitted to the inside surface of a treatment vessel 3, so that a hydrophobic member excellent in the liquid contacting part of the inside surface of the treatment vessel 3 can be arranged without complicatedly working a PTFE material such as tetrafluoroethyline resin, and easily and with a more inexpensive sheet member; and also even if the treatment liquid supplied toward the principal surface of a base plate 1 is splashed on the surface of PTFE, the liquid is repelled and is not attached on the surface. Thus, the treatment liquid is hardly remained on the side and bottom surfaces of the treatment vessel 3, and also it is hardly stagnated even in the inside corner parts, so that the attachment and remaining of the treatment liquid inside the vessel can be significantly prevented, and such a problem that it is caused hitherto by the crystallization of the remaining liquid to form particles can be solved. |
