发明名称 SEMICONDUCTOR WAFER, SEMICONDUCTOR DEVICE, AND METHOD OF PRODUCING SEMICONDUCTOR WAFER
摘要 There is provided a semiconductor wafer including a base wafer whose surface is entirely or partially a silicon crystal plane, an inhibitor positioned on the base wafer to inhibit crystal growth and having an opening that reaches the silicon crystal plane, a first crystal layer made of SixGe1-x (0@x<1) and positioned on the silicon crystal plane that is exposed in the opening, a second crystal layer positioned on the first crystal layer and made of a III-V Group compound semiconductor that has a band gap width larger than a band gap width of the first crystal layer, and a pair of metal layers positioned on the inhibitor and the second crystal layer. The pair of the metal layers are each in contact with the first crystal layer and the second crystal layer.
申请公布号 US2014008698(A1) 申请公布日期 2014.01.09
申请号 US201314018884 申请日期 2013.09.05
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 TAKADA TOMOYUKI;YAMANAKA SADANORI;SHIMADA MASAO;HATA MASAHIKO;ITATANI TARO;ISHII HIROYUKI;KUME EIJI
分类号 H01L31/032;H01L29/24 主分类号 H01L31/032
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