发明名称 APPARATUS OF INGOT GROWING AND METHOD OF THE SAME
摘要 <p>Provided is an ingot growing apparatus, which includes a crucible containing a silicon melt, a pulling device pulling a silicon single crystal ingot grown from the silicon melt, and a dopant supply unit disposed adjacent to the pulling device and for supplying a dopant during growing of the ingot. The neck portion may be doped at a concentration higher than that of the ingot through the dopant supply unit. Therefore, dislocation propagation velocity may be decreased and a propagation length may be shortened.</p>
申请公布号 KR101350114(B1) 申请公布日期 2014.01.09
申请号 KR20110125492 申请日期 2011.11.29
申请人 发明人
分类号 C30B15/00;C30B15/04;C30B29/06 主分类号 C30B15/00
代理机构 代理人
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